Lab for Thin Films - Nanobiomaterials - Nanosystems - Nanometrology


  1. "Real-time multiwavelength ellipsometry diagnostics for monitoring dry cleaning of si wafers and tinx deposition"
    V. Kechagias, M. Gioti, S. Logothetidis, R. Benferhat and D. Teer
    Thin Solid Films 364, 213 (2000)
  2. "In-situ and real-time ellipsometry monitoring of submicron titanium nitride /titanium silicide electronic devices"
    P. Patsalas, C. Charitidis and S. Logothetidis
    Applied Surface Science 154-155, 256 (2000)
  3. "The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films"
    P. Patsalas, C. Charitidis and S. Logothetidis
    Surface and Coatings Technology 125, 335 (2000)
  4. "A comparative study of the nanoscratching behavior of amorphous carbon films grown under different deposition conditions"
    C. Charitidis, S. Logothetidis and M. Gioti
    Surface and Coatings Technology 125, 201 (2000)
  5. "Sputtered amorphous carbon films: micro-structure, density, optical and mechanical properties"
    S. Logothetidis
    International Journal of Modern Physics B 14, 113 (2000)
  6. "A comprehensive study on the properties of multilayered amorphous carbon films"
    S. Logothetidis, C. Charitidis, M. Gioti, Y. Panayiotatos, M. Handrea and W. Kautek
    Diamond and Related Materials 9, 756 (2000)
  7. "Optical properties and new vibrational modes in carbon films"
    M. Gioti, D. Papadimitriou and S. Logothetidis
    Diamond and Related Materials 9, 741 (2000)
  8. "Crystalline structures of carbon complexes in amorphous carbon films"
    Ph. Komninou, G. Nouet, P. Patsalas, Th. Kehagias, M. Gioti, S. Logothetidis and Th. Karakostas
    Diamond and Related Materials 9, 703 (2000)
  9. "Nitrogen induced states at the CNx/Si interface"
    E. Evangelou, N. Konofaos, M. Gioti and S. Logothetidis
    Materials Science Engineering B 71, 315 (2000)
  10. "Magnetron sputtered carbon nitride: composition and chemical bonding of as-grown and post-annealed films studied with real-time & in-situ diagnostic techniques"
    M. Gioti, S. Logothetidis, P. Patsalas, A. Laskarakis, G. Panagiotatos, V. Kechagias
    Surface and Coatings Technology 125, 289 (2000)
  11. "Growth kinetics of sputtered amorphous carbon thin films: composition studies and phenomenological model"
    S. Logothetidis, P. Patsalas, M. Gioti, A. Galdikas, and L. Pranevicius
    Thin Solid Films 376, 56 (2000)
  12. "The effect of post-growth ion irradiation on the microstructure and the interface properties of amorphous carbon films on silicon"
    P. Patsalas, and S. Logothetidis
    J. Appl. Phys. 88, 6346 (2000)
  13. "Optical properties and new forms of as-grown and post-growth ion irradiated amorphous carbon films"
    S. Logothetidis
    Asian Journal of Physics 9, 643 (2000)
  14. "Noise characterization of rf sputtered amorphous carbon films"
    N. Hastas, C. A. Dimitriadis, Y. Panayiotatos, D. H. Tassis, P. Patsalas and S. Logothetidis
    Appl. Phys. Lett. 88, 5482 (2000)
  15. "Characterization of dc magnetron sputtering deposited thin films of TiN for use as a metal electrode on TiN/SiO2/Si MOS devices"
    E.K. Evangelou, N. Konofaos, X.A. Aslanoglou, C.A. Dimitriadis, P. Patsalas, S. Logothetidis, M. Kokkoris, E. Kossionides, R. Vlastou, G. Groetschel
    J. Appl. Phys. 88, 7192 (2000)

  1. "Polycrystalline diamond formation by postgrowth ion bombardment of sputter-deposited amorphous carbon films"
    P. Patsalas, S. Logothetidis, P. Douka, M. Gioti, G. Stergioudis, Ph. Komninou, G. Nouet and Th. Karakostas
    Carbon 37, 865 (1999)
  2. "Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films"
    S. Logothetidis, M. Gioti, C. Charitidis, P. Patsalas, J.Arvanitidis and J. Stoemenos
    Appl. Surf. Sci 138-139, 244 (1999)
  3. "Insights on the deposition mechanism of sputtered amorphous carbon films"
    S. Logothetidis, M. Gioti, P. Patsalas and C. Charitidis
    Carbon 37, 765 (1999)
  4. "Electrical behaviour of Metal/a-C/Si and Metal/CN/Si devices"
    E. Evagelou, N. Konofaos, S. Logothetidis and M. Gioti
    Carbon 37, 871 (1999)
  5. "A new process for the development of hard and stable sputtered amorphous carbon films"
    S. Logothetidis, M. Gioti, C. Charitidis, and P. Patsalas
    Vacuum 53, 61 (1999)
  6. "Composition, chemical bonding and mechanical properties of magnetron sputtered CNx thin films at different substrate bias"
    M. Gioti, S. Logothetidis, C. Charitidis and H. Lefakis
    Vacuum 53, 53 (1999)
  7. "Nanoindentation and nanoscratcing studies of amorphous carbon films''
    C. Charitidis, S. Logothetidis and P. Douka
    Diamond and Related Materials 8, 558 (1999)
  8. "The kinetics of sputtered deposited carbon on Silicon: A phenomenological model"
    Galdikas, S. Logothetidis, P. Patsalas, M. Gioti and L. Pranevicius
    Diamond and Related Materials 8, 490 (1999)
  9. "Optical properties and new carbon forms of sputtered amorphous carbon films''
    M. Gioti and S. Logothetidis
    Diamond and Related Materials 8, 446 (1999)
  10. "HREM study of ultra thin amorphous carbon films and structural changes of carbon forms to diamond under ion bombardment''
    Ph. Komninou, G. Nonet, Th. Kechagias, S. Logothetidis, M.Gioti and Th. Karakostas,
    Diamond and Related Materials 8, 688 (1999)
  11. "A comparative study of composition, structure and elastic properties of Boron Nitride films deposited by magnetron and ion beam sputtering"
    S. Logothetidis, C. Charitidis, P. Patsalas and Th. Kechagias
    Diamond and Related Materials 8, 410 (1999)
  12. "Interfacial stability and atomistic processes in the á - C/ Si (100) heterostructure system"
    P. C. Kelires, M. Gioti and S. Logothetidis
    Phys. Rev. B 59, 5074 (1999)
  13. "New Approach in the Monitoring and Characterization of Titanium Nitride Films"
    S. Logothetidis, E.I. Meletis and G. Kourouklis
    J. Materials Research 14, 436 (1999)
  14. "Structure, mechanical and tribological properties of sputtered TiAIBN thin films"
    C.Rebholz, J.M. Schneider, A.A. Voevodin, J. Steinebrunner, C. Charitidis, A.Leyland, S.Logothetidis and A.Matthews.
    Surface and Coatings Technology 113, 126 (1999)
  15. "Low frequency noise measurements on TiN/n-Si Schottky diodes"
    J.I.Lee, J. Brini, G. Kamarinos, C.A. Dimitriadis, S.Logothetidis, P. Patsalas
    Applied Surface Science 142, 390 (1999)
  16. "Dependence of the dielectric function and electronic properties on the Co layer thickness in giant-magnetoresistance Co/Au multilayers"
    C. Christides, S. Stavroyiannis, D. Niarchos, M. Gioti, S. Logothetidis
    Phys. Rev. B 60, 12239 (1999)
  17. "The effect of boron additions on the tribological behaviour of TiN coatings produced by electron-beam evaporative PVD"
    C.Rebholz, A.Leyland, P. Larourp, C.Charitidis, S.Logothetidis and A.Matthews.
    Surface and Coatings Technology 116-119, 648 (1999)
  18. "Contacts of TiN to n-and-p-type GaN films"
    C.A.Dimitriadis, Th.Karakostas, S.Logothetidis, G.Kamarinos, J.Brini and G.Nonet
    Solid State electronics 43, 1969 (1999)
  19. "Characteristics of TiNx/n-Si Schottky diodes deposited by reactive magnetron sputtering"
    C.A.Dimitriadis, J.I.Lee, P.Patsalas, S.Logothetidis, D.H.Thassis, J.Brini, G.Kamarinos
    J. Appl. Phys. 85, 4238 (1999)
  20. "Room temperature oxidation behavior of FCC TiN thin films"
    S. Logothetidis, E.I. Meletis, G. Stergioudis and A.A. Adjaottor
    Thin Solid Films 304-313, 338 (1999)
  21. "Combined Electrical and mechanical properties of titanium nitride thin films"
    P.Patsalas , C.Charitidis, S.Logothetidis, C.A.Dimitriadis and O.Valassiades
    J.Appl. Phys. 89 5296 (1999)
  22. "Elastic properties if hydrogen-free amorphous carbon thin films and their relation with carbon -carbon bonding"
    S.Logothetidis and C. Charitidis
    Thin Solid Film 353, 208 (1999)
  23. "Effect of layered structure on the electronic properties of amorphous carbon films on n-Si "
    N. Konofaos, E. Evangelou, S. Logothetidis
    J. Appl. Phys. 86 4446 (1999)

  1. "In-situ spectroscopic ellipsometry for monitoring the Ti-Si multilayers during growth and annealing"
    S. Logothetidis, I. Alexandrou and N. Vouroutzis
    Thin Solid Films 275, 44 (1996)
  2. "Optimisation of TiN thin-film growth with in-situ monitoring : the effect of bias voltage and nitrogen flow rate"
    S. Logothetidis, I. Alexandrou and S. Kokkou
    Surf. Coat. Techn. 80, 66 (1996)
  3. "The optical properties of á-C:H films between 1.5 and 10 eV and the effect of thermal annealing on the film character"
    S. Logothetidis, J. Petalas and S. Ves
    J. Appl. Phys. 79, 1040 (1996)
  4. "Titanium nitride films : Studies of growth with in-situ monitoring and the effect of deposition conditions on the films structure and quality"
    S. Logothetidis
    J. Mech. Behav. of Mater. 7, 15 (1996)
  5. "Dielectric function and reflectivity of 3C-silicon carbide and the component perpendicular to the c axis of 6H-silicon carbide in the energy region 1.5-9.5 eV"
    S. Logothetidis and J. Petalas
    J. Appl. Phys. 80, 1768 (1996)
  6. "Hydrogen-free amorphous carbon films approaching diamond prepared by magnetron sputtering"
    S. Logothetidis
    Appl. Phys. Lett. 69, 158 (1996)
  7. "In-situ and real time oxidation studies of the fcc TiN thin films at room temperature"
    S. Logothetidis and A. Barborica
    Microelectronics Enginnering 33, 309 (1997)
  8. "Amorphous carbon films rich in diamond deposited by magnetron sputtering"
    S. Logothetidis and M. Gioti
    Mater. Sci. Eng.B, 46, 119 (1997)
  9. "Studies of density and surface roughness of ultrathin amorphous carbon films, with regards to thickness with X-ray reflectometry and spectroscopic ellipsometry"
    S. Logothetidis and S. Stergioudis
    Appl. Phys. Lett. 71, 2463 (1997)
  10. "Properties and density of states of the interface between silicon and carbon films rich in sp3 bonds"
    S. Logothetidis, E. Evangelou and N. Konofaos
    J. Appl. Phys. 82, 5017 (1997)
  11. "Influence of conventional furnace and rapid thermal annealing on the quality of polycrystalline â - FeSi2 thin films grown from vapor-deposited Fe/Se multilayers"
    D.H. Tassis, C.A. Dimitriadis, S. Boultadakis, J. Arvanitidis, S. Ves, S. Kokkou, S. Logothetidis, O. Valassiades, P. Poulopoulos, N. K. Flevaris
    Thin Solid Films 310, 115 (1997)
  12. "Oxidation and structural changes in fcc TiNx thin films studied with X-ray reflectometry"
    S. Logothetidis, G. Stergioudis and P. Patsalas
    Surface Coatings Technology 100-101, 295 (1998)
  13. "Studies with non-destructive techniques of the composition, initial stages of growth and surface topography of thin amorphous carbon films"
    S. Logothetidis, G. Stergioudis and N. Vouroutzis
    Surface Coatings Technology 100-101, 486 (1998)
  14. "Transmission Electron Microscopy investigation of the structural characteristics of amorphous tetrahedral carbon films"
    Ch. B. Lioutas, N. Vouroutzis, S. Logothetidis and H. Lefakis
    Thin Solid Films 319, 144 (1998)
  15. "Phase transformation of hydrogen free amorphous carbon films under ion beam bombardment"
    Ch. B. Lioutas, N. Vouroutzis, S. Logothetidis and S. Boultadakis
    Carbon 36, 545 (1998)
  16. "New forms of hydrogen free amorphous carbon films"
    S. Logothetidis, M. Gioti and Ch. Lioutas
    Carbon 36, 539 (1998)
  17. "Carbon nitride thin films prepared by reactive rf magnetron sputtering"
    S. Logothetidis, H. Lefakis and M. Gioti
    Carbon 36, 757 (1998)
  18. "The effect of substrate bias in amorphous carbon films prepared by magnetron sputtering and monitored by in-situ Spectroscopic Ellipsometry"
    M. Gioti and S. Logothetidis
    Diamond and Related Materials 7, 444 (1998)
  19. "Post-growth modification of amorphous carbon films under ion beam bombardment : grain size dependence on the films thickness"
    S. Logothetidis, Ch.B. Lioutas and M. Gioti
    Diamond and Related Materials 7, 449 (1998)
  20. "Stability and interdiffusion at the a-C/Si(100) interface"
    S. Logothetidis, M. Gioti and P.C. Kelires
    Journal of Non-Crystalline Solids 227-230, 1113 (1998)
  21. "Investigation of boron nitride films deposited by rf magnetron sputtering with in-situ spectroscopic ellipsometry and stress measurements"
    S. Logothetidis, C. Charitidis, I.M. Kyprianidis, P. Patsalas and M. Gioti
    Journal of the Electrochemical Society Proceedings of the II Symposium on III-V Nitride and Processes 97-34, 142 (1998)
  22. "Optical properties and temperature dependence of the interband transitions of 3C- and 6H-SiC in the energy region 5-10 eV"
    J. Petalas, S. Logothetidis, M. Gioti and J. Janowitz
    Phys. Stat. Sol. B 209, 499 (1998)
  23. "Structural, magnetotransport and optical properties of sputtered Co/Cu multilayers examined as a function of Co layer thickness at the second antiferromagnetic maximum"
    C. Christides, S. Logothetidis, M. Gioti, G. Stergioudis, S. Stavroyiannis and D. Niarchos
    J. Appl. Phys. 83, 7757 (1998)
  24. "Stress relaxation and stability in thick amorphous carbon films deposited in layer structure"
    M. Gioti, S. Logothetidis and C. Charitidis
    Appl. Phys. Lett. 73, 184 (1998)
  25. "Low frequency noise in Schottky barrier contacts of titanium nitride on p-type silicon"
    F. Farmakis, J. Brini, M. Mathiew, G. Kamarinos, C. A. Dimitriadis and S. Logothetidis
    Semicond. Science Technol. 13, 1284 (1998)

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